High precision semiconductor recirculating chiller specially designed for wafer fabrication, thin film deposition, etching, lithography and IC packaging test. Equipped with inverter scroll compressor, electronic expansion valve and feedforward PID control system, achieving temperature stability up to ±0.01℃ under variable heat load. Wetted parts adopt 316L stainless steel or titanium alloy to avoid ion contamination. Sealed closed-loop circulation, low-vibration canned pump, EMC optimized design, fully compliant with SEMI S2 safety standard. Supports DI water, glycol and fluorinated heat transfer fluids. Modbus / BACnet communication is available for fab central monitoring system. Air-cooled and water-cooled versions optional for different cleanroom layout.